en
photolithography tool
An
English
term in
ConceptNet 5.8
Source:
OpenCyc 2012
View this term in the API
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Types of photolithography tool
en
imager
(
n
)
➜
en
masking reticle
(
n
)
➜
en
stepper photolithography
(
n
)
➜
photolithography tool is a type of…
en
device
(
n
)
➜
en
semiconductor processing tool
(
n
)
➜
Links to other resources
sw.opencyc.org
/2012/05/10/concept/en/Photolithography_tool