en
semiconductor processing tool chamber
(
n
)
An
English
term in
ConceptNet 5.8
Source:
OpenCyc 2012
View this term in the API
Documentation
FAQ
Chat
Blog
Documentation
FAQ
Chat
Blog
Types of semiconductor processing tool chamber
en
clean
(
n
)
➜
en
deposition chamber
(
n
)
➜
en
etcher
(
n
)
➜
en
imager
(
n
)
➜
en
polisher
(
n
)
➜
en
thermal chamber
(
n
)
➜
semiconductor processing tool chamber is a type of…
en
semiconductor processing tool
(
n
)
➜
en
tangible thing
(
n
)
➜
Links to other resources
sw.opencyc.org
/2012/05/10/concept/en/SemiconductorProcessingUnitOperationComponent
