Types of semiconductor wafer processing single wafer
- en barrier nitride stressor creation (n) ➜
- en contact creation (n) ➜
- en gate creation (n) ➜
- en n well creation (n) ➜
- en p well creation (n) ➜
- en photolithography step (n) ➜
- en photoresist deposition (n) ➜
- en photoresist development (n) ➜
- en pre gate implantation (n) ➜
- en primary metal layer creation (n) ➜
- en shallow trench isolation (n) ➜
- en silicide creation (n) ➜
- en solder bump creation (n) ➜
- en substrate preparation (n) ➜
- en wafer deposition (n) ➜
- en wafer modification (n) ➜
Links to other resources
- sw.opencyc.org /2012/05/10/concept/en/SemiconductorWaferProcessing_SingleWafer
